晶片蚀刻机

应用Applications


◆各类4”、5”、6”、8”晶片表面SiO2膜的化学蚀刻 
Chemical etching for 4 “, 5”, 6 “, 8” wafer surface with SiO2 film◆石英、光学、太阳能等硅元件的化学蚀刻
Chemical etching for quartz, optical, solar energy silicon element
◆集成微纳系统湿法蚀刻 MEMS wet etching